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Resist coating, Developiing, Exposure, Polishing, Resist stripping

  • AMD**3R, GAMD**3R

    Size : φ3 to 25, 1/8" to 1"

    operating and back pressure : 5 bar

    Particle reduction, water hammer prevention
    Contact CAD Catalog

  • AMDS

    Size : φ3, φ6, φ6.35, 1/8", 1/4"

    Max. drip prevention amount : 0.04 cm3, 0.12 cm3

    Drip prevention, watter hammer prevention
    Contact CAD Catalog

  • AMS

    Size : φ3, φ6, φ6.35, 1/8", 1/4", Rc1/8

    Max. drip prevention amount : 0.04 cm3, 0.12 cm3

    Drip prevention  
    Contact CAD Catalog

  • EVS2

    Max flow rate : 8 ℓ/min(ANR)

    push-in fitting : φ4 ,φ6

    digital pressure control/compact
    Contact CAD Catalog

  • FMD00

    Size : φ6, φ10, 1/4", 3/8"

    Control range : 0.2 to 4 ℓ/min

    Manual needle valve, metal free
    Contact CAD Catalog

  • MNV

    Size : 3/8"

    Fluid temperature : 195℃

    Particle reduction, stable flow rate, eNV
    Contact CAD Catalog

  • PMP

    Size : Size: φ6 to 25, 1/4" to 1"

    Set pressure : 0.2 to 3, 0.7 to 4 bar

    Particle reduction, pilot regulator, high precision
    Contact CAD Catalog