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Ion implantation

  • AGD**R

    Size : 1/4", 3/8", 1/2"

    Fluid temperature : 5 to 80℃

    Air operated valve for process gas
  • AVB **7

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    Size : NW16 to 160

    Body Material : alminum, SUS

    Air operated vacuum valve, high corrosion resistance
  • AVB *47

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    Size : NW25 to 63

    Body Material : alminum

    Air operated vacuum valve, high corrosion resistance, 2 step motion
  • Dummy master

    HFJKE45789-1

    Max stroke (mm) : 1500

    Discount New line
  • LGD

    Size : 1/4", 3/8", 1/2"

    Fluid temperature : 5 to 80℃

    Air operated valve for process gas, simple feature
  • MGD

    Size : 1/4", 3/8"

    Fluid temperature : 5 to 80℃

    Manual valve for process gas, 270°rotation type
  • MN3E/MN4E

    Size : Push-in φ1.8 to 6

    Valve pitch : 7.0mm, 10mm

    Solenoid valve for pilot air, PLC-compatible block manifold
  • MVB

    Size : NW16 to 160

    Body Material : alminum

    High corrosion resistance, manual vacuum valve
  • OGD

    Size : 1/4", 3/8"

    Fluid temperature : 5 to 80℃

    Manual valve for process gas, 90°rotation snap-action
  • PGM

    Size : 1/4", 3/8", 1,125" & 1.5" for integrated system

    Flow rate series : 20 to 200L/min

    Regulator for process gas, particle reduction